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Research Lab

Nano-Electronics Research Lab

Semiconductor Device Process Tools

DI Water System Operational

DI Water System

Resistivity 18.2 MΩcm for Semiconductor Wet Process

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Cleaning Station Operational

Semiconductor Cleaning Station

PP cleaning station cum fume hood with scrubber for semiconductor wet process

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Stirrer Operational

Magnetic Stirrer

Magnetic Stirrer cum Hot Plate for Semiconductor Wet Process

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MicroBalance Operational

Micro Weighing Balance

Resolution 0.01 mg and Capacity <200 gm for Semiconductor Wet Process

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Ultrasonicator Operational

Ultrasonicator

General Ultrasonication Cleaning for Semiconductor Wet Process

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UV Exposure System Operational

UV Exposure System

Resolution ~10 µm for micropatterning using 365nm/254nm wavelength

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Sputtering System Operational

DC Magnetron Sputtering System

For Metallization of Semiconductor Devices

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Semiconductor Devices Characterization Tools

Probe Station Operational

Probe Station

Triax probe station for low leakage electrical measurements of semiconductor devices

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Parameter Analyzer Operational

Parameter Analyzer

Semiconductor parameter analyzer for current measurements of upto 3-terminal Semiconductor Devices

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